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In-line Multi-channel Liquid Particle Measuring System
PID: 2127379
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FLOWVIEW TEK INC.
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新竹縣竹 北成功十二街32號4樓
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Key Features
Thoroughly sustain data accuracy of micro-particle
Perfectly enhance process yield
Significantly reduce quality control costs

  1. Automatically Switch the Multiple-channel According to Customized Recipe
  2. Real-time Monitoring Micro/Nano Particle in a Continuous Flow (Volume, Size)
  3. Intelligent Assembly Line with Quality Record Tracking
  4. Customizable Scheduling and Alarm System

Applications

Inline monitoring water purification system and water cleaning process
Predicting yield by analyzing the micro-/nano-particle counts resulted from the front-/back-end process.

Recording efficacy of the purifier and calculating the lifespan of filter element
Monitoring waste and residue of the cleaning chamber. Revising schedule of filter element replacement with correspondence between particle size and contamination level of the process.

Could be applied to deionized water/chemical liquid
Effectively ensure maintenance scheduling, including consumable replacement, chamber cleaning, etc., to enhance cleanliness and yield.

Features

We know that the purity of deionized water and chemical liquid is the key to wafer cleaning process.

Let FlowVIEW help you stay on top of the most precise micro-particle data!

With the cutting-edge laser induction technology and precision multi-channel Liquid Particle Measuring System that can meet the demand of wet processes in semiconductor industries.

The technology can be integrated into an online machine, multiple sampling points, and is capable of analyzing deionized water and chemical liquid 24 hours a day without interruption to return real-time data. Users can easily interpret the changes of micro-particle counts and effectively monitor the water quality and treatment tank; most importantly, to greatly boost the efficiency of the component cleaning process.

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