We use a fully decoupled patented architecture for isolating vibrations from the floor, environment, or machines or equipment such as moving stages, fans, and internal motors.

Settling times for high-acceleration stages in semiconductor machines typically lie be- tween 200 and 300 ms. Our integrated technology inside the machine can potentially reduce these settling times down to 30–50 ms – a factor of around ten. 半

 

Chip manufacturers designing new fabs to meet vibration specs can achieve significant savings by using Fabreeka® devices for sensitive equipment.