•Highly Accuracy at Low Flow
•Fast Response≦2.0 sec
•Wide Pressure Range Available(1500 PSIG)
•No Leakage
•No Temperature or Pressure Required
•Connection compatible
•High stable removable sensor
•Corrosion resistance Value
•Excellent Linearity
•Excellent long term Stability
•Modular design
•Compact Flow Control System
•With RS-485 function
•Option function:Interface and Separate Type
Option Display with Digital: RS485 (default) / DeviceNet
HS Code 9026
•Fast Response≦2.0 sec
•Wide Pressure Range Available(1500 PSIG)
•No Leakage
•No Temperature or Pressure Required
•Connection compatible
•High stable removable sensor
•Corrosion resistance Value
•Excellent Linearity
•Excellent long term Stability
•Modular design
•Compact Flow Control System
•With RS-485 function
•Option function:Interface and Separate Type
Option Display with Digital: RS485 (default) / DeviceNet
HS Code 9026
Digital Thermal Mass Flow Controller
TMFC500V Digital Thermal Mass flow Controller
TMFM500V Digital Thermal MAss Flow Meter
Specifications
- Highly Accuracy at Low Flow
- Fast Response≦2.0 sec
- Wide Pressure Range Available(1500 PSIG)
- No Leakage
- No Temperature or Pressure Required
- Connection compatible
- High stable removable sensor
- Corrosion resistance Value
- Excellent Linearity
- Excellent long term Stability
- Modular design
- Compact Flow Control System
- With RS-485 function
- Option function:Interface and Separate Type
Option Display with Digital: RS485 (default) / DeviceNet
Model | TMFC500V | TMFC500VD | TMFC500A | TMFC500A | |
Flow Range(N2) | 300~1000SLM | 300~1000SLM | 300~1000SLM | 300~1000SLM | |
Response Time | ≦2.0 sec | ||||
Accuracy | ±1.0 % FS | ||||
Repeatabllity | ±0.25 % FS | ||||
Proof Pressure | 1500 PSI | ||||
Leak rate | 1 x 10-9 atm.cc/sec or less | ||||
Working temperature Range | 0~50℃ | ||||
Materials of parts in contact w/gases | Body:SUS316 | ||||
Valve seat:Vition™(Option Bura™ or Kalrez™ or Teflon™) | |||||
Joint | Standard:1/2" compression | ||||
Option: 1/4" Compression or VCR™,3/8" Compression or VCR™ | |||||
Electrical connections | Dsub 15-pin male connector per standards | ||||
Flow rate input signals | 0~5 Vdc | 0~5 Vdc+RS-475 | 4~20mA | 4~20mA+RS-485 | |
Flow rate output signals | 0~5 Vdc | 0~5 Vdc+RS-475 | 4~20mA | 4~20mA+RS-485 | |
required power supply | +15~28 Vdc/350mA | ||||
Option display | Use to Type | ◎Yes | No | ◎Yes | No |
Display interface | Option:Interface or Separate Type(With Cable Line 1M or 3M) for TMFC125V/A only | ||||
communication Interface | Digital: RS485 (default) / DeviceNet™ for TMFC125V/A only | ||||
Power supply | AC110~240 V for TMFC125V/A only |